Design and fabrication of scanning mirror for laser display
نویسندگان
چکیده
A 1500mm 1200 mm silicon scanning mirror for laser display has been designed and fabricated by deep inductively coupled plasma reactive ion etching (ICPRIE) and flip chip bonding technology. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. The upper structure is composed of a scanning mirror plate, two torsion bars, a supporting frame and vertical comb fingers. The lower structure is composed of vertical comb fingers, a supporting frame, gold signal lines and pads on the Pyrex glass substrate. The comb fingers are etched by ICPRIE and assembled by flip chip aligner bonder. This scanning mirror can be used for laser display as a galvanometric vertical scanner. # 2002 Elsevier Science B.V. All rights reserved.
منابع مشابه
SOI-based fabrication processes of the scanning mirror having vertical comb fingers
A 1500 mm 1200 mm scanning mirror having vertical comb fingers has been fabricated by using silicon-on-insulator (SOI)-based fabrication processes. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. The comb fingers are etched by deep inductively coupled plasma reactive ion etching (ICPRIE) and assembled by the flip chip aligner bonder. ...
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